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Dependence of the Non-prestonian behavior on characteristics of ceria slurry in STI-CMP6
- Authors
- 백운규
- Issue Date
- 22-Oct-2004
- Place
- 제주대학교
- Conference Name
- 가을 한국물리학회
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Collections - 서울 공과대학 > 서울 에너지공학과 > 2. Conference Papers
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Related Researcher
- Paik, Ungyu
- COLLEGE OF ENGINEERING (DEPARTMENT OF ENERGY ENGINEERING)