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Design of SOI wafer can have a proximity gettering ability By NH3/Ar Rapid Thermal Annealing
- Authors
- 박재근
- Issue Date
- 21-Oct-2004
- Place
- 제주도
- Conference Name
- 한국물리학회 추계학술발표대회
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Collections - 서울 공과대학 > 서울 융합전자공학부 > 2. Conference Papers
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