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The modification of icp plasma etching characteristics of SiO2 waveguide film by femtosecond laser
- Authors
- 신동욱
- Issue Date
- 23-Jun-2004
- Publisher
- Ceramic Processing Research Center
- Citation
- 2004 international Nano Ceramics/Crystals Forum and international Symposium on intermaterials
- Conference Name
- 2004 international Nano Ceramics/Crystals Forum and international Symposium on intermaterials
- Place
- 한양 대학교
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- SHIN, DONG WOOK
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)