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Optical properties of nanostructured SiOxNy prepared by plasma enhanced chemical vapor deposition
- Authors
- 김은규
- Issue Date
- 27-Oct-2003
- Publisher
- Fudan University
- Citation
- Inter. Symp. on Advanced Photonic Science and Technology
- Conference Name
- Inter. Symp. on Advanced Photonic Science and Technology
- Place
- Shanghai & Wu-Yi, China
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Collections - 서울 자연과학대학 > 서울 물리학과 > 2. Conference Papers
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