Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Properties of Si-based Nanostuructures Fabricated by PECVD and UHV Sputtering Methods
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김은규 | - |
| dc.date.accessioned | 2021-08-04T06:05:41Z | - |
| dc.date.available | 2021-08-04T06:05:41Z | - |
| dc.date.created | 2021-06-30 | - |
| dc.date.issued | 2003-09-24 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/74850 | - |
| dc.publisher | Quantum Photonic Science Research Center | - |
| dc.title | Properties of Si-based Nanostuructures Fabricated by PECVD and UHV Sputtering Methods | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | 김은규 | - |
| dc.identifier.bibliographicCitation | 10th Korea-China Symposium on Thin Film Materials | - |
| dc.relation.isPartOf | 10th Korea-China Symposium on Thin Film Materials | - |
| dc.citation.title | 10th Korea-China Symposium on Thin Film Materials | - |
| dc.citation.conferencePlace | Seoul | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 1 | - |
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - 서울 자연과학대학 > 서울 물리학과 > 2. Conference Papers
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.