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Properties of Si-based Nanostuructures Fabricated by PECVD and UHV Sputtering Methods
- Authors
- 김은규
- Issue Date
- 24-Sep-2003
- Publisher
- Quantum Photonic Science Research Center
- Citation
- 10th Korea-China Symposium on Thin Film Materials
- Conference Name
- 10th Korea-China Symposium on Thin Film Materials
- Place
- Seoul
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Collections - 서울 자연과학대학 > 서울 물리학과 > 2. Conference Papers
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