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유도결합 플라즈마(ICP)를 이용한 Er 첨가된 광도파막 식각 특성 연구
- Authors
- 신동욱
- Issue Date
- 14-May-2004
- Publisher
- Material Research Society of Korea
- Citation
- Material Research Society of Korea
- Conference Name
- Material Research Society of Korea
- Place
- 강릉대학교
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- SHIN, DONG WOOK
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)