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STI CMP용 나노세리아 슬러리에서 계면활성제 분자량의 영향
- Authors
- 백운규
- Issue Date
- 14-May-2004
- Place
- 강릉대학교
- Conference Name
- 한국재료학회 춘계학술발표 및 제6회 신소재심포지엄
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Collections - 서울 공과대학 > 서울 에너지공학과 > 2. Conference Papers
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Related Researcher
- Paik, Ungyu
- COLLEGE OF ENGINEERING (DEPARTMENT OF ENERGY ENGINEERING)