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Dependence of Planarization efficiency on crystal characteristic of abrasives in nano ceria slurry for shallow trench isolation chemical mechanical polishing
- Authors
- 백운규
- Issue Date
- 20-Feb-2004
- Place
- 무주리조트
- Conference Name
- 제11회 한국반도체학술대회
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Collections - 서울 공과대학 > 서울 에너지공학과 > 2. Conference Papers
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Related Researcher
- Paik, Ungyu
- COLLEGE OF ENGINEERING (DEPARTMENT OF ENERGY ENGINEERING)