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Nanotopography Impact and Non-Prestonian Behavior of Ceria Slurry in STI-CMP
- Authors
- 박재근
- Issue Date
- 20-Feb-2004
- Place
- Mujoo Resort, Seoul, Korea
- Conference Name
- Korean Confernce on Semiconductors 11th
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Collections - 서울 공과대학 > 서울 융합전자공학부 > 2. Conference Papers
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