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Characteristics of Al2O3 Films Depositied by Atomic Layer Deposition Method Using Various Oxidants

Authors
전형탁
Issue Date
20031202
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/75436
Place
Hynes Convention Center and Sheraton Boston HotelBoston,U.S.A
Conference Name
2003 MRS Fall Meeting
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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Jeon, Hyeongtag
COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)
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