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기계화학적인 연마에서 슬러리의 특성에 다른 나노토포그래피의 영향과 numerical 시뮬레이션

Authors
백운규
Issue Date
21-Nov-2003
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/75482
Place
연세대학교
Conference Name
2003 추계 한국재료학회
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서울 공과대학 > 서울 에너지공학과 > 2. Conference Papers

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