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The intelligent ceramic particulate slurry for damascene gate process in ULSI
- Authors
- 백운규
- Issue Date
- 15-Nov-2003
- Place
- 한양대학교
- Conference Name
- ACGT&SNS
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Collections - 서울 공과대학 > 서울 에너지공학과 > 2. Conference Papers
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Related Researcher
- Paik, Ungyu
- COLLEGE OF ENGINEERING (DEPARTMENT OF ENERGY ENGINEERING)