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The Intelligent Ceramic Particulate Slurry for Damascene Gate Process in ULSI
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 박재근 | - |
| dc.date.accessioned | 2021-08-04T06:35:55Z | - |
| dc.date.available | 2021-08-04T06:35:55Z | - |
| dc.date.issued | 2003-11-15 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/75571 | - |
| dc.title | The Intelligent Ceramic Particulate Slurry for Damascene Gate Process in ULSI | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | Advanced Crystal Growth Conference and 2003 International Symposium on Substrate Engineering | - |
| dc.citation.conferencePlace | 한양대학교(KOREA) | - |
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