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The Intelligent Ceramic Particulate Slurry for Damascene Gate Process in ULSI
- Authors
- 박재근
- Issue Date
- 15-Nov-2003
- Place
- 한양대학교(KOREA)
- Conference Name
- Advanced Crystal Growth Conference and 2003 International Symposium on Substrate Engineering
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Collections - 서울 공과대학 > 서울 융합전자공학부 > 2. Conference Papers
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