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screen 플라즈마 질화처리시 질화층 성장에 대한 N2O 전처리의 영향
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김영도 | - |
| dc.date.accessioned | 2021-08-04T06:36:05Z | - |
| dc.date.available | 2021-08-04T06:36:05Z | - |
| dc.date.issued | 20031114 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/75583 | - |
| dc.title | screen 플라즈마 질화처리시 질화층 성장에 대한 N2O 전처리의 영향 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 추계학술발표대회 및 기술강연회 | - |
| dc.citation.conferencePlace | 복사골연수원(경기도 부천시) | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Kim, Young Do
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)