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screen 플라즈마 질화처리시 질화층 성장에 대한 N2O 전처리의 영향
- Authors
- 김영도
- Issue Date
- 20031114
- Place
- 복사골연수원(경기도 부천시)
- Conference Name
- 추계학술발표대회 및 기술강연회
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Kim, Young Do
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)