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Experimental investigation on capacitively coupled plasma source using a passive resonant antenna
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 정진욱 | - |
| dc.date.accessioned | 2021-07-30T08:31:40Z | - |
| dc.date.available | 2021-07-30T08:31:40Z | - |
| dc.date.issued | 2020-10-05 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/7595 | - |
| dc.title | Experimental investigation on capacitively coupled plasma source using a passive resonant antenna | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | APS Gaseous Electronics Conference 2020 | - |
| dc.citation.conferencePlace | 온라인 | - |
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)