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Analysis of the slurry role in nanotopography impact for STI chemical mechanical polishing
- Authors
- 백운규
- Issue Date
- 25-Apr-2003
- Conference Name
- 제79회 정기총회
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Collections - 서울 공과대학 > 서울 에너지공학과 > 2. Conference Papers
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Related Researcher
- Paik, Ungyu
- COLLEGE OF ENGINEERING (DEPARTMENT OF ENERGY ENGINEERING)