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Screen 플라즈마 질화처리시 화합물층 성장에 대한 N2O 전처리의 영향

Authors
김영도
Issue Date
24-Apr-2003
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/76713
Place
안동대학교
Conference Name
2003 대한금속, 재료학회 춘계학술대회
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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