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The effect of physical characteristics of cerium oxide on nanotopography of chemical mechanical polishing for shallow trench isolation
- Authors
- 백운규
- Issue Date
- 18-Apr-2003
- Place
- 경기대학교
- Conference Name
- 2003 춘계 한국세라믹학회
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Collections - 서울 공과대학 > 서울 에너지공학과 > 2. Conference Papers
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Related Researcher
- Paik, Ungyu
- COLLEGE OF ENGINEERING (DEPARTMENT OF ENERGY ENGINEERING)