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Nano-ceramic particulate system for ILD/STI CMP
- Authors
- 백운규
- Issue Date
- 21-Jan-2003
- Place
- 서울 코엑스
- Conference Name
- SEMICON Korea 2003
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Collections - 서울 공과대학 > 서울 에너지공학과 > 2. Conference Papers
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Related Researcher
- Paik, Ungyu
- COLLEGE OF ENGINEERING (DEPARTMENT OF ENERGY ENGINEERING)