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Characteristics of TiN films deposited by plasma enhanced atomic layer deposition (PEALD) method
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 전형탁 | - |
| dc.date.accessioned | 2021-08-04T07:35:49Z | - |
| dc.date.available | 2021-08-04T07:35:49Z | - |
| dc.date.issued | 2002-11-28 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/77067 | - |
| dc.title | Characteristics of TiN films deposited by plasma enhanced atomic layer deposition (PEALD) method | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 2002 Annual Conference of Core University Program (CUP) on Ceramic Materials Technology | - |
| dc.citation.conferencePlace | Hanyang University, Seoul, Korea | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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