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세리아 슬러리를 사용한 화학적 기계적 연마에서 연마제의 형태와 계면 활성제의 농도가 미치는 영향

Authors
백운규
Issue Date
1-Nov-2002
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/77281
Place
배재대학교
Conference Name
한국재료학회
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서울 공과대학 > 서울 에너지공학과 > 2. Conference Papers

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