Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
ALD로 증착시킨 HfO2/SiON 게이트 유전물질의 특성
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 안진호 | - |
| dc.date.accessioned | 2021-08-04T07:38:53Z | - |
| dc.date.available | 2021-08-04T07:38:53Z | - |
| dc.date.issued | 20021101 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/77283 | - |
| dc.title | ALD로 증착시킨 HfO2/SiON 게이트 유전물질의 특성 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 2002년도 한국재료학회 추계학술발표 | - |
| dc.citation.conferencePlace | 배재대학교 | - |
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)