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Advanced Disposable Spacer를 이용한 Low Vcc Operation용 0.12um 저전력 SRAM공정개발에 관한 연구

Authors
전형탁
Issue Date
1-Nov-2002
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/77295
Place
배재대학교
Conference Name
2002년도 한국재료학회 추계학술발표
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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