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Oxygen precipitation behavior on the crystal nature of CZ grown Si crystal

Authors
백운규
Issue Date
21-Aug-2002
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/77834
Place
제주 그랜드 호텔
Conference Name
The 11th Seoul International Symposium on the Physics of Semiconductors and applications-2002
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서울 공과대학 > 서울 에너지공학과 > 2. Conference Papers

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