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유기소스 원자층 증착법으로 증착된 TiN박막의 특성 연구
- Authors
- 김영도
- Issue Date
- 17-May-2002
- Place
- 한양대학교 안산캠퍼스
- Conference Name
- 춘계학술발표강연
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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