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PEALD법으로 증착된 ZrO2 Gate Dielectric의 열처리 온도에 따른 특성의 변화
- Authors
- 전형탁
- Issue Date
- 20020517
- Place
- 한양대학교(안산) 제1과학기술관 및 백남 학술관
- Conference Name
- 2002 한국재료학회 춘계학술발표대회
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Jeon, Hyeongtag
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)