Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
극자외선 노광 공정용 Mo/Si 반사형 다층 박막의 특성 연구
- Authors
- 정용재
- Issue Date
- 2-Nov-2001
- Publisher
- 한국재료학회
- Citation
- 2001년도 한국재료학회 추계학술대회
- Conference Name
- 2001년도 한국재료학회 추계학술대회
- Place
- 고려대학교
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
Related Researcher
- Chung, Yong Chae
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)