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극자외선 노광 공정용 Mo/Si 반사형 다층 박막의 특성 연구
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 안진호 | - |
| dc.date.accessioned | 2021-08-04T08:37:53Z | - |
| dc.date.available | 2021-08-04T08:37:53Z | - |
| dc.date.issued | 20011102 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/78826 | - |
| dc.description.abstract | 우수논문상 수상 | - |
| dc.title | 극자외선 노광 공정용 Mo/Si 반사형 다층 박막의 특성 연구 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 2001년도 한국재료학회 추계 학술발표강연 | - |
| dc.citation.conferencePlace | 고려대학교 | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)