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Fabrication of Al/PZT/RuO2 Micro Cantilever System and Computer Simulation of Resonant Characteristics

Authors
정용재
Issue Date
28-May-2001
Publisher
Ceramic Processing Reaserch Center(CPRC)
Citation
NCF5 & IMA5
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/79471
Conference Name
NCF5 & IMA5
Place
Hanyang University
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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Chung, Yong Chae
COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)
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