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EUVL 응용을 위한 Mo/Si 박막 특성 전산모사
- Authors
- 정용재
- Issue Date
- 27-Apr-2001
- Publisher
- 한국세라믹학회
- Citation
- 2001년도 춘계학술연구발표회
- Conference Name
- 2001년도 춘계학술연구발표회
- Place
- 인하대학교 서호관
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Chung, Yong Chae
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)