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EUVL 응용을 위한 Mo/Si 박막 특성의 전산모사
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 안진호 | - |
| dc.date.accessioned | 2021-08-04T09:18:23Z | - |
| dc.date.available | 2021-08-04T09:18:23Z | - |
| dc.date.issued | 2001-04-27 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/79642 | - |
| dc.title | EUVL 응용을 위한 Mo/Si 박막 특성의 전산모사 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 한국세라믹학회 2001년도 춘계학술논문발표회 | - |
| dc.citation.conferencePlace | 인하대학교 서호관 | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)