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PSD를 이용한 AFM용 미세 탐촉자의 변위측정장치

Authors
장경영
Issue Date
28-Oct-2000
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/80069
Place
경기도 수원시 아주대
Conference Name
한국정밀공학회 2000년도 추계 학술대회
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서울 공과대학 > 서울 기계공학부 > 2. Conference Papers

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