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Digital Deposition of Tungsten Nitride Thin Layer by Cyclic Exposure of WF6 and NH3
- Authors
- 전형탁
- Issue Date
- 25-Jul-2000
- Place
- Kitakyushu Japan
- Conference Name
- ICEE2K
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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