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Atomic layer chemical vapor deposition of TiN on Si(100) and Si(111)
- Authors
- 전형탁
- Issue Date
- 27-Apr-2000
- Place
- Sanfransisco, USA
- Conference Name
- MRS Symposium
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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