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질화규소표면에서의 SiO2피막형성에 따른 polymer의 흡착거동

Authors
백운규
Issue Date
23-Oct-1999
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/81018
Place
동신대학교
Conference Name
99 추계 한국요업학회
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서울 공과대학 > 서울 에너지공학과 > 2. Conference Papers

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