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TiN thin film deposited by atomic layer deposition method
- Authors
- 전형탁
- Issue Date
- 19990601
- Place
- Seoul
- Conference Name
- NCF3 & IMA 99
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Jeon, Hyeongtag
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)