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PECVD system으로 증착한 다결정 실리콘 박막에 있어 수소처리가 미치는 영향
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 홍진표 | - |
| dc.date.accessioned | 2021-08-04T10:25:03Z | - |
| dc.date.available | 2021-08-04T10:25:03Z | - |
| dc.date.issued | 1999-04-01 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/81590 | - |
| dc.title | PECVD system으로 증착한 다결정 실리콘 박막에 있어 수소처리가 미치는 영향 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 한국물리학회 학술발표회 | - |
| dc.citation.conferencePlace | 건국대학교 | - |
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Collections - 서울 자연과학대학 > 서울 물리학과 > 2. Conference Papers
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Related Researcher
- Hong, Jin Pyo
- COLLEGE OF NATURAL SCIENCES (DEPARTMENT OF PHYSICS)