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Cyclic-CVD법으로 증착된 TiN박막의 특성연구
- Authors
- 전형탁
- Issue Date
- 1-Feb-1999
- Conference Name
- 한국반도체 학술대회
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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