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시분할 화학증착 장치를 이용한 TiN박막의성장과 특성
- Authors
- 전형탁
- Issue Date
- 1-Nov-1998
- Conference Name
- 한국재료학회 추계 학술대회
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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