Two-step rapid thermal annealing(RTA)기법으로 제작된 다결정 실리콘 박막의 구조적 전기적 특성연구
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 홍진표 | - |
dc.date.accessioned | 2021-08-04T10:38:15Z | - |
dc.date.available | 2021-08-04T10:38:15Z | - |
dc.date.issued | 19981001 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/81968 | - |
dc.title | Two-step rapid thermal annealing(RTA)기법으로 제작된 다결정 실리콘 박막의 구조적 전기적 특성연구 | - |
dc.type | Conference | - |
dc.citation.conferenceName | 한국물리학회 학술발표회 | - |
dc.citation.conferencePlace | 전북대학교 | - |
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