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Epitaxial growth of CoSi2 on silicon oxide which was chemicaly grown on Si(100)

Authors
전형탁
Issue Date
1-Jul-1998
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/82231
Conference Name
IUMRS-ICEM-98
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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