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저유전상수 폴리이미드와 SiO2 절연막 위에 증착된 Al박막의 일렉트로마이그레이션 특성비교

Authors
김영호
Issue Date
1-May-1998
Publisher
한국재료학회
Citation
98 한국재료학회춘계학술발표회 초록집
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/82376
Conference Name
98 한국재료학회춘계학술발표회 초록집
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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