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Si(100)의 얇은 산화막을 통한 CoSi2형성에 관한 연구
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- 전형탁
- Issue Date
- 1-May-1997
- Conference Name
- 한국재료회,춘계학회:13
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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