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The effect of UV/O3 and HF on the removal of metallic impurities and the surfaceroughness on Si(100) surface
- Authors
- 전형탁
- Issue Date
- 1-Oct-1996
- Conference Name
- 한국물리학회 초록집
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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