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4도 off axis Si(100)기판과 on-axis Si(100)기판위에서의 Ti-silicide상 형성
- Authors
- 전형탁
- Issue Date
- 1-May-1996
- Conference Name
- 한국재료학회초록집
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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