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초청정 Si 기판위에 동시증착한 TiSi2의상전이와 계면 및 표면형성에 관한 연구

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전형탁
Issue Date
1-May-1993
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https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/84478
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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