Comparison of Si₃N₄-SiO₂ and SiO₂ Insulation Layer for Zero-Bias CMUT Operation Using Dielectric Charging Effects

Abstract

In this letter, we report the characteristics of zero-bias capacitive micromachined ultrasonic transducers (CMUTs) in various aspects, considering the transmission and reception sensitivity and evaluation of the long-term stability with ac transmission in immersion. The main idea of the zero-bias CMUT implementation is that the charge is injected by the dielectric charging effects in an insulation layer in the pull-in state. The CMUT was fabricated by a local oxidation of silicon (LOCOS) process, and the insulation layer consists of Si-₃ N-₄ -SiO₂ and SiO₂, which have been commonly used in previous studies. A study on the charging effects is reported to quantitatively observe the voltage shift by charge transfer with time dependence at different temperatures and collapsing time dependence. Therefore, we successfully implemented a zero-bias CMUT with a transmission efficiency of 4.62 kPa/V at a center frequency of 7.53 MHz in Si-₃ N-₄-SiO₂ and a transmission efficiency of 6.78 kPa/V at a center frequency of 7.86 MHz in SiO₂ immersion.